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Proceedings Paper

Multilayer films for figured x-ray optics
Author(s): David L. Windt
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Paper Abstract

High reflectance multilayer films can now be deposited onto figured substrate to make focusing X-ray mirrors. In this paper, I discuss a variety of topics associated with the development and further refinement of such X-ray optics: high- efficiency multilayer films for use near normal incidence in the 170 - 300 Angstrom region; depth-graded multilayer films for broad-band reflectance in the 10 - 100 keV region; surface roughness and it's effect on mirror performance; and finally stresses in multilayer films.

Paper Details

Date Published: 11 December 1998
PDF: 11 pages
Proc. SPIE 3448, Crystal and Multilayer Optics, (11 December 1998); doi: 10.1117/12.332515
Show Author Affiliations
David L. Windt, Lucent Technologies/Bell Labs. (United States)


Published in SPIE Proceedings Vol. 3448:
Crystal and Multilayer Optics
Albert T. Macrander; Andreas K. Freund; Tetsuya Ishikawa; Dennis M. Mills, Editor(s)

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