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Proceedings Paper

Double expansion of wavefront deformation in Zernike polynomials over the pupil and the field of view of optical systems: lens design, testing, and alignment
Author(s): Il'ya P. Agurok
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Paper Abstract

The double expansion of wavefront deformation in Zernike polynomials over the pupil and the field-of-view is a promising approach for lens design, testing, and alignment. Conventional wavefront representation in Zernike polynomial expansion from the pupil coordinates makes it very cumbersome to consider the optical system condition over the field-of- view. Evaluating the properties of symmetry of centered and perturbed systems can provide a compact representation of wavefront deformation over the field-of-view. Even for complicated optical systems such as lithography objectives, 8 to 12 global coefficients can provide a comprehensive system description. Coefficients for centered and perturbed systems are independent.

Paper Details

Date Published: 8 December 1998
PDF: 8 pages
Proc. SPIE 3430, Novel Optical Systems and Large-Aperture Imaging, (8 December 1998); doi: 10.1117/12.332493
Show Author Affiliations
Il'ya P. Agurok, Physical Optics Corp. (United States)


Published in SPIE Proceedings Vol. 3430:
Novel Optical Systems and Large-Aperture Imaging
Kevin Dean Bell; Michael K. Powers; Jose M. Sasian, Editor(s)

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