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Proceedings Paper

Design simulation and optimization of micro-optical components
Author(s): Ingo Sieber; Horst Eggert; Helmut Guth; Wilfried Jakob
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Paper Abstract

Manufacturing test structures of microsystems and microcomponents is very expensive in terms of time and materials. In conventional design processes, this limits the number of design variants to be considered. For this reason, computer-supported design techniques are becoming more and more important in microsystems technology. The article describes a micro-optical structure as an example demonstrating the factors which disturb the operation of a micro-optical module, and derives a theoretical description of the system under consideration which allows the system parameters to be optimized with respect to the disturbing influences by means of an evolutionary search method.

Paper Details

Date Published: 8 December 1998
PDF: 12 pages
Proc. SPIE 3430, Novel Optical Systems and Large-Aperture Imaging, (8 December 1998); doi: 10.1117/12.332468
Show Author Affiliations
Ingo Sieber, Forschungszentrum Karlsruhe (Germany)
Horst Eggert, Forschungszentrum Karlsruhe (Germany)
Helmut Guth, Forschungszentrum Karlsruhe (Germany)
Wilfried Jakob, Forschungszentrum Karlsruhe (Germany)


Published in SPIE Proceedings Vol. 3430:
Novel Optical Systems and Large-Aperture Imaging
Kevin Dean Bell; Michael K. Powers; Jose M. Sasian, Editor(s)

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