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Proceedings Paper

Niobium nitride/aluminum nitride superlattices
Author(s): Zoe H. Barber; El Hadi S. Sadki; Richard A. Doyle; Stephen J. Lloyd; Mark G. Blamire
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Paper Abstract

DC reactive magnetron sputtering has been used to prepare niobium nitride/aluminium nitride superconducting/insulator superlattices. Deposition conditions were optimized in order that multilayer fabrication could be achieved by simple computer control of the substrate positioning beneath each sputtering target.

Paper Details

Date Published: 9 December 1998
PDF: 12 pages
Proc. SPIE 3480, Superconducting Superlattices II: Native and Artificial, (9 December 1998); doi: 10.1117/12.332445
Show Author Affiliations
Zoe H. Barber, Univ. of Cambridge (United Kingdom)
El Hadi S. Sadki, Univ. of Cambridge (United Kingdom)
Richard A. Doyle, Univ. of Cambridge (United Kingdom)
Stephen J. Lloyd, Univ. of Cambridge (United Kingdom)
Mark G. Blamire, Univ. of Cambridge (United Kingdom)


Published in SPIE Proceedings Vol. 3480:
Superconducting Superlattices II: Native and Artificial
Ivan Bozovic; Davor Pavuna, Editor(s)

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