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Proceedings Paper

Characterization of Mo/B4C soft x-ray multilayer mirrors for 7.3- to 8.0-nm radiation
Author(s): Junxia Lu; Yueying Ma; Shu Pei; Jianlin Cao; Xingdan Chen
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Paper Abstract

Mo/B4C is chosen for the materials of the multilayer mirrors for 7.3nm and 8.0nm. The structural parameter has been designed and the mirrors has been fabricated by magnetron sputtering. Details in the microstructure of Mo/B4C multilayer were revealed using x-ray diffraction and TEM. The period thickness of each mirrors can be determined from the curve of x-ray diffraction, and they are 3.74nm and 4.12nm, respectively, which are in good agreement with the design parameters.

Paper Details

Date Published: 19 November 1998
PDF: 4 pages
Proc. SPIE 3444, X-Ray Optics, Instruments, and Missions, (19 November 1998); doi: 10.1117/12.331287
Show Author Affiliations
Junxia Lu, Changchun Institute of Optics and Fine Mechanics (China)
Yueying Ma, Changchun Institute of Optics and Fine Mechanics (China)
Shu Pei, Changchun Institute of Optics and Fine Mechanics (China)
Jianlin Cao, Changchun Institute of Optics and Fine Mechanics (China)
Xingdan Chen, Changchun Institute of Optics and Fine Mechanics (China)


Published in SPIE Proceedings Vol. 3444:
X-Ray Optics, Instruments, and Missions
Richard B. Hoover; Arthur B. C. Walker, Editor(s)

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