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Proceedings Paper

Fabrication and characterization of integrated waveguide for use at G-band
Author(s): G. M. Parkhurst; John W. Digby; M. Schrama; Arzhang Ardavan; J. Martyn Chamberlain; J. Singleton; Chris Collins; David Paul Steenson; Robert E. Miles; R. D. Pollard; John W. Bowen; N. J. Cronin
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Paper Abstract

The fabrication of air-filled rectangular metal-pipe waveguide using a lithographically-based technique has recently been reported. This type of waveguide, together with other passive components such as antennas, couplers, mixers and filters may offer a realistic route to terahertz frequency integrated circuits in view of the compatibility of the fabrication technique with those of standard semiconductor processing. In this contribution, we report the fabrication of a range of waveguide components for operation at frequencies of up to 300 GHz. These measurements represent the highest frequency characterization study so far reported for a micromachined passive structure of this type and provide proof of TE10 propagation with the expected cut-off frequency. Numerous measurements have been taken using G-band (WR-F) guide which show an attenuation loss of approximately 0.6 dB per guide wavelength at 200 GHz. This low value of attneuation shows that these micromachined waveguide are viable components for use in integrated circuits at terahertz frequencies. The insertion loss repeatability (due to mismatch effects at the ports of the waveguides) has been measured and has been shown to be better than plus or minus 0.5 dB. Preliminary results are presented for J-band (WR-3) waveguide which clearly shows the cut off frequency.

Paper Details

Date Published: 13 November 1998
PDF: 5 pages
Proc. SPIE 3465, Millimeter and Submillimeter Waves IV, (13 November 1998); doi: 10.1117/12.331156
Show Author Affiliations
G. M. Parkhurst, Univ. of Nottingham (United Kingdom)
John W. Digby, Univ. of Nottingham (United Kingdom)
M. Schrama, Univ. of Oxford (United Kingdom)
Arzhang Ardavan, Univ. of Oxford (United Kingdom)
J. Martyn Chamberlain, Univ. of Nottingham (United Kingdom)
J. Singleton, Univ. of Oxford (United Kingdom)
Chris Collins, Univ. of Nottingham (UK) and Univ. of Leeds (United Kingdom)
David Paul Steenson, Univ. of Leeds (United Kingdom)
Robert E. Miles, Univ. of Leeds (United Kingdom)
R. D. Pollard, Univ. of Leeds (United Kingdom)
John W. Bowen, Univ. of Reading (United Kingdom)
N. J. Cronin, Univ. of Bath (United Kingdom)


Published in SPIE Proceedings Vol. 3465:
Millimeter and Submillimeter Waves IV
Mohammed N. Afsar, Editor(s)

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