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Proceedings Paper

Determination of the elastic properties of carbon thin films using scanning acoustic microscopy
Author(s): A. Pageler; Klaus Kosbi; Ulf G. Brauneck; Hans Gerd G. Busmann; Siegfried Boseck
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Paper Abstract

Scanning acoustic microscopy is used to determine elastic properties of carbon thin films. The films have been deposited by fullerene-argon-ionbeam deposition on crownglass substrates. With V(z) measurements, their elastic constants and experimental dispersion relations can be obtained. These are compared with numerically calculated dispersion relations. Using a simplex method for least- square data fitting the Young's modulus, the shear modulus and Poisson's ratio of the measured carbon thin films were determined.

Paper Details

Date Published: 11 November 1998
PDF: 7 pages
Proc. SPIE 3581, Acousto-Optics and Applications III, (11 November 1998); doi: 10.1117/12.330498
Show Author Affiliations
A. Pageler, Univ. of Bremen (Germany)
Klaus Kosbi, Univ. of Bremen (Germany)
Ulf G. Brauneck, Fraunhofer Institute of Applied Materials Research (Germany)
Hans Gerd G. Busmann, Fraunhofer Institute of Applied Materials Research (Germany)
Siegfried Boseck, Univ. of Bremen (Germany)

Published in SPIE Proceedings Vol. 3581:
Acousto-Optics and Applications III
Antoni Sliwinski; Bogumil B. J. Linde; Piotr Kwiek, Editor(s)

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