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Proceedings Paper

Determination of the bonding qualities of layered gold/silicon systems using higher SAW modes
Author(s): Thomas Blum; Klaus Kosbi; Ulla Scheer; Siegfried Boseck
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Paper Abstract

Dispersion curves of SAWs propagating on the surface of a layered system wee obtained by measurement of the surface wave velocities for various ultrasonic frequencies. Results are presented for two and three layered specimens: gold/silicon and gold/chromium/silicon. A comparison with numerically simulated dispersion curves shows that Sezawa modes were measured. The elastic constants, namely c11 and c44, of gold films with thicknesses up to 2 micrometers were determined by minimization the difference between the theoretical and the experimental values in a least-square sense. The resulting Young modulus E yields information about a stiffer layer structure caused by the influence of an chromium interlayer. The modification of the interface between film and substrate is characterized. The results confirm the use of chromium for better adhesion.

Paper Details

Date Published: 11 November 1998
PDF: 4 pages
Proc. SPIE 3581, Acousto-Optics and Applications III, (11 November 1998); doi: 10.1117/12.330484
Show Author Affiliations
Thomas Blum, Univ. of Bremen (Germany)
Klaus Kosbi, Univ. of Bremen (Germany)
Ulla Scheer, Univ. of Bremen (Germany)
Siegfried Boseck, Univ. of Bremen (Germany)


Published in SPIE Proceedings Vol. 3581:
Acousto-Optics and Applications III

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