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Proceedings Paper

Submicrofabrication of periodical structures on a metallic film surface by intracavity laser processing
Author(s): Vasily V. Valyavko; Vladimir P. Osipov
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Paper Abstract

In this work it is reported about the further development of the intracavity method of the solid state surface processing by the laser radiation. It is experimentally shown the possibility to form 2D periodical micron and submicron surface structures, looking as a system of squares, rectangles and parallelograms. A new type of the laser cavity allowed to fabricate a system of regular microhollows with submicron characteristic sizes even by means of the carbon dioxide laser treatment (10.6-micron radiation wavelength).

Paper Details

Date Published: 6 November 1998
PDF: 4 pages
Proc. SPIE 3580, Photoconversion: Science and Technologies, (6 November 1998); doi: 10.1117/12.330455
Show Author Affiliations
Vasily V. Valyavko, Institute of Physics (Belarus)
Vladimir P. Osipov, Institute of Physics (Belarus)

Published in SPIE Proceedings Vol. 3580:
Photoconversion: Science and Technologies
Maksymilian Pluta; Mariusz Szyjer, Editor(s)

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