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Proceedings Paper

X-ray microfocusing by a Ti/Al multilayer zone plate and a Bragg-Fresnel lens
Author(s): Masaki Koike; Isao H. Suzuki; Satoshi Komiya
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Paper Abstract

A 1D Bragg-Fresnel lens for monochromatizing and focusing hard x-rays has been developed using a multilayer zone plate and a crystal. Ti and Al have ben chosen as material for phase modulation type zone plate. About 400 payers of Ti and Al were alternately deposited on a plane substrate according to the Fresnel's formula using a helicon plasma sputtering technique, in which Ar gas pressure was less than 1 mTorr. The total thickness of the layers is about 128 micrometers . The multilayered plane was sliced vertically and glued onto Ge(211) crystal, and thinned to about 10 micrometers . The synchrotron light source was focused one dimensionally, and the focal line width was measured by a knife edge scan techniques.

Paper Details

Date Published: 6 November 1998
PDF: 4 pages
Proc. SPIE 3449, X-Ray Microfocusing: Applications and Techniques, (6 November 1998); doi: 10.1117/12.330339
Show Author Affiliations
Masaki Koike, Electrotechnical Lab. (Japan)
Isao H. Suzuki, Electrotechnical Lab. (Japan)
Satoshi Komiya, Fujitsu Labs. Ltd. (Japan)

Published in SPIE Proceedings Vol. 3449:
X-Ray Microfocusing: Applications and Techniques
Ian McNulty, Editor(s)

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