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Proceedings Paper

Phase zone plates for hard x-ray microscopy
Author(s): Burkhard Kaulich
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Paper Abstract

Phase zone plates are commonly used in x-ray microscopy techniques when high spatial resolution and high photon flux in the focal spot are desired. Extending the fabrication techniques of phase zone plates for use in the soft x-ray region to higher photon energies becomes difficult due to the high aspect ratios of the zone structures which have to be created. As an alternative, the sputtered sliced zone plate method has been applied. In this technology, a thin microwire is deposited alternately with two different materials. Zone plates are generated from the rod by slicing it perpendicular to its axis and thinning the slices down the required zone plate thickness. Theoretical investigations on the demands on generating these zone plates as well as the generation process are discussed. Recent measurements will be presented.

Paper Details

Date Published: 6 November 1998
PDF: 10 pages
Proc. SPIE 3449, X-Ray Microfocusing: Applications and Techniques, (6 November 1998); doi: 10.1117/12.330336
Show Author Affiliations
Burkhard Kaulich, European Synchrotron Radiation Facility (Italy)

Published in SPIE Proceedings Vol. 3449:
X-Ray Microfocusing: Applications and Techniques
Ian McNulty, Editor(s)

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