Share Email Print
cover

Proceedings Paper

Foundry mask shop in Taiwan
Author(s): Chue-San Yoo; Jia-Jing Wang
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Abstract

Foundry maskshop is deemed to be one of the major contributors to the success of a wafer foundry fab. Our maskshop has two unique features. First, we have highly automated information cross-flow between the wafer fab and maskshop. Second, we develop mask technology together with photolithography technology in wafer fabs.

Paper Details

Date Published: 1 September 1998
PDF: 5 pages
Proc. SPIE 3412, Photomask and X-Ray Mask Technology V, (1 September 1998); doi: 10.1117/12.328856
Show Author Affiliations
Chue-San Yoo, Taiwan Semiconductor Manufacturing Co., Ltd. (Taiwan)
Jia-Jing Wang, Taiwan Semiconductor Manufacturing Co., Ltd. (Taiwan)


Published in SPIE Proceedings Vol. 3412:
Photomask and X-Ray Mask Technology V
Naoaki Aizaki, Editor(s)

© SPIE. Terms of Use
Back to Top