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Proceedings Paper

Novel statistical calibration method for laser scanners
Author(s): Jerry Xiaoming Chen; Yung-Tsai Chris Yen
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Paper Abstract

Calibration of laser scanner is usually a complicated procedure and is only carried out in the manufacture site. Here we report a new statistical calibration method that is simple and easy. It can be carried out in either customer or manufacture site. This new approach is much more accurate than the current factory calibration method.

Paper Details

Date Published: 30 October 1998
PDF: 11 pages
Proc. SPIE 3426, Scattering and Surface Roughness II, (30 October 1998); doi: 10.1117/12.328463
Show Author Affiliations
Jerry Xiaoming Chen, Dupont Photomasks Inc. (United States)
Yung-Tsai Chris Yen, Micro Lithography Inc. (United States)

Published in SPIE Proceedings Vol. 3426:
Scattering and Surface Roughness II
Zu-Han Gu; Alexei A. Maradudin, Editor(s)

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