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Proceedings Paper

NIST virtual/physical random-profile roughness calibration standards
Author(s): Jun-Feng Song; Christopher J. Evans; M. McGlauflin; E. Whitenton; Theodore V. Vorburger; Y. Yuan
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Paper Abstract

The NIST (National Institute of Standards and Technology) virtual/physical surface roughness calibration standard consists of physical specimens whose surfaces are manufactured by a numerically controlled diamond-turning process using digitized profiles. These standards are designed for checking the characteristics and algorithms of surface measuring systems, and for sensing the amount of distortion of the surface information flow though different measuring systems. The digitized profiles can also be used for remote instrument calibration and surface measurement unification. The design, manufacture, test results, and potential uses of the NIST prototype specimens are discussed.

Paper Details

Date Published: 30 October 1998
PDF: 9 pages
Proc. SPIE 3426, Scattering and Surface Roughness II, (30 October 1998); doi: 10.1117/12.328457
Show Author Affiliations
Jun-Feng Song, National Institute of Standards and Technology (United States)
Christopher J. Evans, National Institute of Standards and Technology (United States)
M. McGlauflin, National Institute of Standards and Technology (United States)
E. Whitenton, National Institute of Standards and Technology (United States)
Theodore V. Vorburger, National Institute of Standards and Technology (United States)
Y. Yuan, NIST and Harbin Institute of Technology (China)


Published in SPIE Proceedings Vol. 3426:
Scattering and Surface Roughness II
Zu-Han Gu; Alexei A. Maradudin, Editor(s)

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