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Proceedings Paper

Laser and emission spectroscopies for studying a diamond deposition MPACVD reactor
Author(s): Alix Gicquel; Francois Silva; Marc Dubus; Khaled Hassouni; Xavier Duten
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Paper Abstract

Correlations between some plasma characteristics and diamond ones are reported while changing the coupled action of some parameters: microwave power density, substrate temperature, and methane and nitrogen concentrations in the feed gas mixture. Based on this correlation, an interpretation for the formation of diamond films with a < 100 > texture associated with (100) faces morphology in presence of nitrogen is proposed.

Paper Details

Date Published: 20 October 1998
PDF: 16 pages
Proc. SPIE 3484, Lasers in Synthesis, Characterization, and Processing of Diamond, (20 October 1998); doi: 10.1117/12.328219
Show Author Affiliations
Alix Gicquel, Univ. Paris-Nord (France)
Francois Silva, Univ. Paris-Nord (France)
Marc Dubus, Univ. Paris-Nord (France)
Khaled Hassouni, Univ. Paris-Nord (France)
Xavier Duten, Univ. Paris-Nord (France)

Published in SPIE Proceedings Vol. 3484:
Lasers in Synthesis, Characterization, and Processing of Diamond
Vitali I. Konov; Victor G. Ralchenko, Editor(s)

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