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Proceedings Paper

Three-dimensional distributions of methyl density in a hot-filament CVD reactor: comparison with cavity ring-down spectroscopy measurements
Author(s): Yuri A. Mankelevich; Nikolay V. Suetin
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Paper Abstract

Developed 3D model of a hot-filament chemical vapor deposition reactor is used to reconstruct the methyl density spatial distributions and to describe reactor parameters dependencies of CH3 which have been measured, by others, using a line-of-sight optical technique called cavity ring- down spectroscopy (CRDS). In the model full set of transport equations taking into account the detailed gas-phase reaction mechanisms, molecular diffusion and thermodiffusion, catalytic hydrogen dissociation at the filament and surface kinetics at the substrate is numerically solved. The results of 3D and 2D model calculations are compared with the high sensitivity measurements of methyl radical absorbance at 231.9 nm by CRDS. Good quantitative agreement of experimental data and 3D model results, in contrast to 2D model calculations, was obtained. An importance of 3D effects for the species densities and gas temperature distributions is revealed.

Paper Details

Date Published: 20 October 1998
PDF: 10 pages
Proc. SPIE 3484, Lasers in Synthesis, Characterization, and Processing of Diamond, (20 October 1998); doi: 10.1117/12.328217
Show Author Affiliations
Yuri A. Mankelevich, Moscow State Univ. (Russia)
Nikolay V. Suetin, Moscow State Univ. (Russia)


Published in SPIE Proceedings Vol. 3484:
Lasers in Synthesis, Characterization, and Processing of Diamond

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