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Proceedings Paper

Use of resonance-enhanced multiphoton ionization (REMPI) for probing hydrogen atoms in diamond chemical vapor deposition using a hot filament reactor
Author(s): Stephen A. Redman; Stephen R. Langford; Keith N. Rosser; Michael N. R. Ashfold
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Paper Abstract

We illustrate advantages of H atom multiphoton ionization spectroscopy, resonance enhanced at the two photon energy by the 2s1. 2S1/2 state, as a means of obtaining spatially resolved, relative H atom concentrations and gas temperature profiles within a hot filament CVD reactor, and investigating the way in which these parameters depend on process conditions.

Paper Details

Date Published: 20 October 1998
PDF: 9 pages
Proc. SPIE 3484, Lasers in Synthesis, Characterization, and Processing of Diamond, (20 October 1998); doi: 10.1117/12.328216
Show Author Affiliations
Stephen A. Redman, Univ. of Bristol (United Kingdom)
Stephen R. Langford, Univ. of Bristol (United Kingdom)
Keith N. Rosser, Univ. of Bristol (United Kingdom)
Michael N. R. Ashfold, Univ. of Bristol (United Kingdom)


Published in SPIE Proceedings Vol. 3484:
Lasers in Synthesis, Characterization, and Processing of Diamond
Vitali I. Konov; Victor G. Ralchenko, Editor(s)

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