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Proceedings Paper

Pulsed-laser-driven plasma CVD of CN/BN compound films
Author(s): Vladimir G. Ageev; M. V. Ugarov; E. N. Loubnin; Vitali I. Konov
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Paper Abstract

The deposition of boron nitride and carbon nitride films by laser-induced plasma CVD was performed for the first time. The composition and structure of films grown in different experimental conditions was studied by methods of Raman spectroscopy and x-ray photoelectron spectroscopy. It was found that high fractions of sp3 C-N bonding in CN films and hexagonal type B-N bonding in BN films can be produced by this method. All the synthesized films were amorphous. The prospective for the development of B-C-N based compounds deposition by laser plasma technique is discussed.

Paper Details

Date Published: 20 October 1998
PDF: 8 pages
Proc. SPIE 3484, Lasers in Synthesis, Characterization, and Processing of Diamond, (20 October 1998); doi: 10.1117/12.328215
Show Author Affiliations
Vladimir G. Ageev, General Physics Institute (Russia)
M. V. Ugarov, General Physics Institute (Russia)
E. N. Loubnin, General Physics Institute (Russia)
Vitali I. Konov, General Physics Institute (Russia)


Published in SPIE Proceedings Vol. 3484:
Lasers in Synthesis, Characterization, and Processing of Diamond
Vitali I. Konov; Victor G. Ralchenko, Editor(s)

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