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Proceedings Paper

Oxygen-assisted laser cutting and drilling of CVD diamond
Author(s): V. V. Migulin; Victor G. Ralchenko; Y.-J. Baik
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Paper Abstract

A Nd:YAG laser was used for cutting and drilling of thick free-standing diamond films produced by microwave plasma chemical vapor deposition. The laser machining rate was evaluated at different irradiation parameters such as laser power, beam scanning velocity and number of repetitive scans. Carbon oxidation in presence of oxygen flow in the cutting/drilling area is shown to result in smooth and clean sidewalls and top surface around grooves and holes. A beneficial effect of O2 stream on cutting and drilling rate was also observed.

Paper Details

Date Published: 20 October 1998
PDF: 5 pages
Proc. SPIE 3484, Lasers in Synthesis, Characterization, and Processing of Diamond, (20 October 1998); doi: 10.1117/12.328205
Show Author Affiliations
V. V. Migulin, General Physics Institute (Russia)
Victor G. Ralchenko, General Physics Institute (Russia)
Y.-J. Baik, Korea Institute of Science and Technology (South Korea)


Published in SPIE Proceedings Vol. 3484:
Lasers in Synthesis, Characterization, and Processing of Diamond
Vitali I. Konov; Victor G. Ralchenko, Editor(s)

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