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Proceedings Paper

CVD diamond TEM sample preparation by laser machining
Author(s): James E. Butler; D. J. Vestyck; A. Gilmore; J. W. Steeds
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Paper Abstract

The defect structure of diamond films grown by microwave plasma chemical vapor deposition (CVD) in studied by using laser machining to slice thin sections from free standing films ca. 200 microns thick. This technique has enabled the examination of the defects at the nucleation and growth surface of optically clear CVD diamond films. A cw Q- switched Nd3+/YAG laser was used to slice 1 to 15 micron thick wedges, ca. 3mm in length from 150 to 220 micron thick diamond films. The edges of the as cut wedges were thin enough for examination by transmission electron microscopy. Subsequent ion milling was used to thin the edges further. Remarkably low defect densities are observed at the growth surface after 150 microns of growth.

Paper Details

Date Published: 20 October 1998
PDF: 4 pages
Proc. SPIE 3484, Lasers in Synthesis, Characterization, and Processing of Diamond, (20 October 1998); doi: 10.1117/12.328198
Show Author Affiliations
James E. Butler, Naval Research Lab. (United States)
D. J. Vestyck, Geo-Centers Inc. (United States)
A. Gilmore, Univ. of Bristol (United Kingdom)
J. W. Steeds, Univ. of Bristol (United Kingdom)

Published in SPIE Proceedings Vol. 3484:
Lasers in Synthesis, Characterization, and Processing of Diamond
Vitali I. Konov; Victor G. Ralchenko, Editor(s)

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