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Proceedings Paper

Improving the radiometric performance of silicon-micromachined thermal infrared sources
Author(s): R. Barry Johnson
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Paper Abstract

The emitting area of the infrared sources comprising silicon micromachined thermal pixel arrays is often notably smaller than the actual pixel area. This results in the infrared sources being operated at higher temperatures than apparent temperatures which therefore limits radiometric dynamic range. An optomechanical means has been developed that transforms the low-fill factor devices into having a much higher fill factor. The theory, fabrication, and initial tests results are presented.

Paper Details

Date Published: 26 October 1998
PDF: 7 pages
Proc. SPIE 3436, Infrared Technology and Applications XXIV, (26 October 1998); doi: 10.1117/12.328076
Show Author Affiliations
R. Barry Johnson, Optical E.T.C., Inc. (United States)


Published in SPIE Proceedings Vol. 3436:
Infrared Technology and Applications XXIV
Bjorn F. Andresen; Marija Strojnik, Editor(s)

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