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Proceedings Paper

Variation of the complex refractive indices with Sb-addition in Ge-Sb-Te alloy and their wavelength dependence
Author(s): Sang-Youl Kim; Sang J. Kim; Hun Seo; Myong R. Kim
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Paper Abstract

The complex refractive index of phase-change Ge2Sb2+xTe5 media fabricated by DC magnetron sputtering has been determined by using spectroscopic ellipsometry and atomic force microscopy. The composition of Ge2Sb2+xTe5 analyzed by Inductively Coupled Plasma/Atomic Emission Spectrometer and X-ray Fluorescence was in the range 0.08 less than or equal to x less than or equal to 0.58. The complex refractive index and the reflectivity have been verified nearly constant with Sb-addition at 780 nm, 650 nm, and 410 nm, respectively.

Paper Details

Date Published: 23 October 1998
PDF: 4 pages
Proc. SPIE 3401, Optical Data Storage '98, (23 October 1998); doi: 10.1117/12.327935
Show Author Affiliations
Sang-Youl Kim, Ajou Univ. (South Korea)
Sang J. Kim, Ajou Univ. (Korea, Republic of)
Hun Seo, LG Corporate Institute of Technology (South Korea)
Myong R. Kim, LG Corporate Institute of Technology (South Korea)

Published in SPIE Proceedings Vol. 3401:
Optical Data Storage '98
Shigeo R. Kubota; Tomas D. Milster; Paul J. Wehrenberg, Editor(s)

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