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Proceedings Paper

Near-field optical readout for phase-changed marks
Author(s): Takashi Nakano; Junji Tominaga; Nobufumi Atoda
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Paper Abstract

We have observed near-field optical images of phase change marks and evaluated the readout signals including the optical near-field. Samples were composed of multilayered structures on glass substrates. Crystalline marks were recorded by a focused laser beam with an optical microscope in the as-deposited amorphous films. In readout, the optical and the topographical images of the recorded marks were evaluated at the same time by a collection mode near-field scanning optical microscope (NSOM). The surface profiles showed less than 1 nm dips around the marks. Therefore it means that the NSOM image of phase change marks depends on the refractive index change. The evaluated signal modulation of the optical image showed a sinusoidal curve to the top SiN layer thickness, and the maximum modulation was 60 percent.

Paper Details

Date Published: 13 October 1998
PDF: 6 pages
Proc. SPIE 3467, Far- and Near-Field Optics: Physics and Information Processing, (13 October 1998); doi: 10.1117/12.326828
Show Author Affiliations
Takashi Nakano, National Institute for Advanced Interdisciplinary Research (Japan)
Junji Tominaga, National Institute for Advanced Interdisciplinary Research (Japan)
Nobufumi Atoda, National Institute for Advanced Interdisciplinary Research (Japan)


Published in SPIE Proceedings Vol. 3467:
Far- and Near-Field Optics: Physics and Information Processing
Suganda Jutamulia; Toshimitsu Asakura, Editor(s)

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