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Proceedings Paper

Fields associated with the solid immersion lens
Author(s): Gordon S. Kino
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Paper Abstract

The principles of operation of the solid immersion lens (SIL) are described. Two types of SIL, the hemisphere and super-sphere, and their tolerances, are discussed. Several application of the SIL to microscopy, lithography, and optical storage are reviewed, along with a description of the theoretical considerations for determining the spot size, the effect of the air gap, and the effect of multiple- layer structures on the ellipticity of the spot.

Paper Details

Date Published: 13 October 1998
PDF: 10 pages
Proc. SPIE 3467, Far- and Near-Field Optics: Physics and Information Processing, (13 October 1998); doi: 10.1117/12.326811
Show Author Affiliations
Gordon S. Kino, Stanford Univ. (United States)

Published in SPIE Proceedings Vol. 3467:
Far- and Near-Field Optics: Physics and Information Processing
Suganda Jutamulia; Toshimitsu Asakura, Editor(s)

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