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Proceedings Paper

Geometry versus optical performance of micromirrors and arrays
Author(s): M. Adrian Michalicek; John H. Comtois; Heather K. Schriner
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Paper Abstract

This paper describes the design, fabrication, surface characterization, and adaptive optics simulation of advanced surface micromachined micromirror devices. Design considerations and fabrication capabilities are presented. Various shapes and array distributions of unique Flexure- Beam Micromirror Devices are simulated for adaptive optics performance against several typical optical aberrations. These devices are fabricated in the state-of-the-art, four- level, planarized, ultra-low-stress polysilicon process available at Sandia National Laboratories known as the Sandia Ultra-planar Multi-level MEMS Technology (SUMMiT). This enabling process permits the development of micromirror devices with near-ideal characteristics that have previously been unrealizable in standard three-layer polysilicon processes. The advanced capabilities of this process along with customized layout tools have permitted the fabrication of highly advanced and often irregular shapes of mirror surfaces that can be uniquely distributed to minimize wavefront error across the pupil.

Paper Details

Date Published: 13 October 1998
PDF: 8 pages
Proc. SPIE 3440, Photonics for Space Environments VI, (13 October 1998); doi: 10.1117/12.326690
Show Author Affiliations
M. Adrian Michalicek, Air Force Research Lab. (United States)
John H. Comtois, Air Force Research Lab. (United States)
Heather K. Schriner, Sandia National Labs. (United States)


Published in SPIE Proceedings Vol. 3440:
Photonics for Space Environments VI
Edward W. Taylor, Editor(s)

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