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Proceedings Paper

Measurements of the optical functions of uniaxial crystals using two-modulator generalized ellipsometry (2-MGE)
Author(s): Gerald E. Jellison; Frank A. Modine; Lynn A. Boatner
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Paper Abstract

A new 2-modulator generalized ellipsometer (2-MGE) is used to determine the optical functions of uniaxial materials. This new instrument measures 8 parameters, compared with two parameters measured by standard spectroscopic ellipsometers. These 8 parameters can be used to determine the 6 independent elements in the reduced Jones matrix describing light reflecting from a surface. For orientations of the optical axes significantly different from normal incidence, these measurements can be used to determine the optical functions of uniaxial materials. The resulting optical functions are the most accurate available for photon energies greater than the band gap (where transmission measurements cannot be performed), and they compare well with minimum deviation techniques which are more accurate for photon energies in the transparent region. Several examples will be given, including rutile (TiO2), ZnO, and BiI3.

Paper Details

Date Published: 8 October 1998
PDF: 7 pages
Proc. SPIE 3425, Optical Diagnostic Methods for Inorganic Transmissive Materials, (8 October 1998); doi: 10.1117/12.326667
Show Author Affiliations
Gerald E. Jellison, Oak Ridge National Lab. (United States)
Frank A. Modine, Oak Ridge National Lab. (United States)
Lynn A. Boatner, Oak Ridge National Lab. (United States)


Published in SPIE Proceedings Vol. 3425:
Optical Diagnostic Methods for Inorganic Transmissive Materials
Raju V. Datla; Leonard M. Hanssen, Editor(s)

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