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Proceedings Paper

Laser diodes applications for contamination control in microelectronics fabrication processes
Author(s): Dumitru Gh. Ulieru
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Paper Abstract

The increasing complexity of semiconductor devices and corresponding dimensions decreasing till the most advanced semiconductor chips manufactured in 0.35 micrometers or 0.25 micrometers need more cleanliness technological conditions. From this whole field the particles are not even detected or detectable in today's fabs will become killer contaminants of future technology of 0.18 micrometers . The particle must first be detected before they can be eradicated. For this reason the most recommended investigation apparatus are optical particle counters and condensation nucleus counter for determining of airborne particle concentration and as ultrapure water chemicals, gases and vacuum particle counter. In the paper I have analyzed the laser diode application as light sources with the counting results sizing data generation and performance parameters which shown the benefits of their using. All the systems presented can be used for monitoring of particle concentrations for ultrapure fluids from microelectronics fab processes and can be recommended to all microelectronics fabs.

Paper Details

Date Published: 8 October 1998
PDF: 12 pages
Proc. SPIE 3415, Laser Diodes and Applications III, (8 October 1998); doi: 10.1117/12.326628
Show Author Affiliations
Dumitru Gh. Ulieru, Romes S.A. (Romania)

Published in SPIE Proceedings Vol. 3415:
Laser Diodes and Applications III
Pierre Galarneau, Editor(s)

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