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Proceedings Paper

Flexible microgrippers fabricated on photosensitive glass for micromanipulation
Author(s): Riad Salim; Helmut Wurmus
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Paper Abstract

In this paper a new development for microgripping will be presented. The main specific features are the on microfabrication based manufacturing, the multi gear ratio motion transmission and the one piece design of the gripper structure. The fabrication of microgripper is based on a UV- lithographic process in microstructurable, photosensitive glass. The most important feature of this new approach is the nonlinear behavior of the motion translation. Compliant mechanisms consisting of hinges with exactly calculated stiffnesses were microfabricated using the microstructuring technologies of the Microsystems. By using the integrated mechanical stop the microgripper is able to change the gearing ratio during the movement. In this way it is possible to get more gripper flexibility compared with just linear transmission (gearing). The combination of the microfabrication, backlash-free and nonlinear motion transmission make the new gripper an innovative approach for the field of microassembly. The new developed grippers were fabricated and tested successfully.

Paper Details

Date Published: 5 October 1998
PDF: 4 pages
Proc. SPIE 3519, Microrobotics and Micromanipulation, (5 October 1998); doi: 10.1117/12.325728
Show Author Affiliations
Riad Salim, Technical Univ. of Ilmenau (Germany)
Helmut Wurmus, Technical Univ. of Ilmenau (Germany)

Published in SPIE Proceedings Vol. 3519:
Microrobotics and Micromanipulation
Armin Sulzmann; Bradley J. Nelson, Editor(s)

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