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Proceedings Paper

Laser polarization superresolution in surface microscopy
Author(s): Oleg V. Angelsky; Alexander G. Ushenko; Serhiy B. Yermolenko
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Paper Abstract

New possibilities for measurement of slightly-rough surfaces provided by usage of polarization optics in modern interference measuring devices are considered.

Paper Details

Date Published: 19 August 1998
PDF: 2 pages
Proc. SPIE 3573, OPTIKA '98: 5th Congress on Modern Optics, (19 August 1998); doi: 10.1117/12.324575
Show Author Affiliations
Oleg V. Angelsky, Chernivtsy Univ. (Ukraine)
Alexander G. Ushenko, Chernivtsy Univ. (Ukraine)
Serhiy B. Yermolenko, Chernivtsy Univ. (Ukraine)


Published in SPIE Proceedings Vol. 3573:
OPTIKA '98: 5th Congress on Modern Optics
Gyorgy Akos; Gabor Lupkovics; Andras Podmaniczky, Editor(s)

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