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Proceedings Paper

Novel concepts and technologies for manufacturing optical microdevices
Author(s): Wolfgang Ehrfeld; Hans-Dieter Bauer; Dietrich Drews; Manfred Lacher
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Paper Abstract

The development and fabrication of micro-optical devices are of increasing importance in the field of data- and telecommunication networks capable of transmitting multimedia signals with high bit rates. Miniature optical sensors such as spectrometers and interferometers are another example for rapidly growing markets with a wide range of applications in biotechnology, chemistry, pharmacy, environmental technology, and automation, to namely only the most obvious. Various technologies are used for the development and fabrication of such devices. However, the success of the resulting product heavily depends on its price. Therefore, the techniques for the manufacture of micro-optical devices are at least as important as the product itself. In this presentation fabrication concepts and technologies will be discussed. By fabrication we naturally mean more than the production of a master that allows mass-production of the product. Among the criteria are also the pros and cons of the material to be used, automated assembly aspects, the compatibility with existing components or systems etc.

Paper Details

Date Published: 19 August 1998
PDF: 9 pages
Proc. SPIE 3573, OPTIKA '98: 5th Congress on Modern Optics, (19 August 1998); doi: 10.1117/12.324561
Show Author Affiliations
Wolfgang Ehrfeld, Institut fuer Mikrotechnik Mainz GmbH (Germany)
Hans-Dieter Bauer, Institut fuer Mikrotechnik Mainz Gmb (Germany)
Dietrich Drews, Institut fuer Mikrotechnik Mainz GmbH (Germany)
Manfred Lacher, Institut fuer Mikrotechnik Mainz GmbH (Germany)


Published in SPIE Proceedings Vol. 3573:
OPTIKA '98: 5th Congress on Modern Optics

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