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Proceedings Paper

Optical fiber profilometer with submicronic accuracy
Author(s): Yasser Alayli; Danping Wang; Marc Bonis
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Paper Abstract

This paper describes the experimental setup, test procedure and data-processing of the new profilometer based on an optical fiber displacement sensor. For performing test procedure this sensor is mounted on a high precision linear stage. The optical fiber probe consists of a bundle of optical fibers in a a star configuration. The linear displacement system is mounted on hydrostatic bearings, the guideways are made from zerodur with a planeity better than 0,25 micrometers . The stage is moved by a friction drive over a distance of 220 mm and controlled by an optical encoder with a resolution of 4 nm. The surface profile of a piece from standard polished stainless steel measured by our profilometer is presented.

Paper Details

Date Published: 27 August 1998
PDF: 4 pages
Proc. SPIE 3509, In-Line Characterization Techniques for Performance and Yield Enhancement in Microelectronic Manufacturing II, (27 August 1998); doi: 10.1117/12.324423
Show Author Affiliations
Yasser Alayli, Compiegne Univ. of Technology (France)
Danping Wang, Compiegne Univ. of Technology (France)
Marc Bonis, Compiegne Univ. of Technology (France)


Published in SPIE Proceedings Vol. 3509:
In-Line Characterization Techniques for Performance and Yield Enhancement in Microelectronic Manufacturing II
Sergio A. Ajuria; Tim Z. Hossain, Editor(s)

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