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Proceedings Paper

Scanning auger microscopy studies of microelectronic features
Author(s): Sandro Santucci; Luca Lozzi; Davide Pacifico; P. Picozzi; Roberto Alfonsetti; Giuseppe Moccia
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Paper Abstract

Scanning Auger Microscopy has been applied to study two typical problems in microelectronic features: depth profile analysis and defects. We have performed Auger depth profiles with and without the sample rotation during the sputtering and we have compared the results in terms of interface width and uniformity of the sputtered surface. Atomic Force Microscopy has been used to characterize the surface morphology and its results have been correlated to Auger map data. Microelectronics structures with a sizes of about 400 nm have been studied by means of Auger high resolution maps before and after electrical tests, in order to determine the effects of the tests on their structure.

Paper Details

Date Published: 27 August 1998
PDF: 8 pages
Proc. SPIE 3509, In-Line Characterization Techniques for Performance and Yield Enhancement in Microelectronic Manufacturing II, (27 August 1998); doi: 10.1117/12.324419
Show Author Affiliations
Sandro Santucci, INFM and Univ. degli Studi dell'Aquila (Italy)
Luca Lozzi, INFM and Univ. degli Studi dell'Aquila (Italy)
Davide Pacifico, INFM and Univ. degli Studi dell'Aquila (Italy)
P. Picozzi, INFM and Univ. degli Studi dell'Aquila (Italy)
Roberto Alfonsetti, Texas Instruments Italia SpA (Italy)
Giuseppe Moccia, Texas Instruments Italia SpA (Italy)


Published in SPIE Proceedings Vol. 3509:
In-Line Characterization Techniques for Performance and Yield Enhancement in Microelectronic Manufacturing II
Sergio A. Ajuria; Tim Z. Hossain, Editor(s)

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