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Proceedings Paper

In-line inspection optimization using a yield management system
Author(s): Fumio Mizuno; Seiji Isogai
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Paper Abstract

We have studied optimization of in-line inspection in terms of Cost of Ownership. We have defined that Cost of Yield Loss of in-line inspection steps is 'the potential cost of products lost by unfitness of in-line inspection' and cleared that optimized of in-line inspection is 'the cost reduction of yield loss brought by missing the occurrence of process or process tool excursions'. From this point of view, we have studied and proposed a method for in-line inspection optimization.

Paper Details

Date Published: 27 August 1998
PDF: 11 pages
Proc. SPIE 3509, In-Line Characterization Techniques for Performance and Yield Enhancement in Microelectronic Manufacturing II, (27 August 1998); doi: 10.1117/12.324406
Show Author Affiliations
Fumio Mizuno, Hitachi, Ltd. (Japan)
Seiji Isogai, Hitachi, Ltd. (Japan)


Published in SPIE Proceedings Vol. 3509:
In-Line Characterization Techniques for Performance and Yield Enhancement in Microelectronic Manufacturing II
Sergio A. Ajuria; Tim Z. Hossain, Editor(s)

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