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Proceedings Paper

Dynamic gas chemistry simulator for vacuum systems
Author(s): James Durham; Steve Felker
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Paper Details

Date Published: 3 September 1998
PDF: 6 pages
Proc. SPIE 3507, Process, Equipment, and Materials Control in Integrated Circuit Manufacturing IV, (3 September 1998); doi: 10.1117/12.324366
Show Author Affiliations
James Durham, Motorola (United States)
Steve Felker, Motorola (United States)


Published in SPIE Proceedings Vol. 3507:
Process, Equipment, and Materials Control in Integrated Circuit Manufacturing IV
Anthony J. Toprac; Kim Dang, Editor(s)

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