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Proceedings Paper

HECTOR: transnanometer Z-axis calibration artifacts for semiconductor process control
Author(s): Alson E. Hatheway
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Paper Abstract

An electromagnetic Lorenz force transducer has been coupled to an Angstrom elastic transducer to form a new compound transducer in which the displacement output is proportional to the current input. It is called the HECTOR transducer and has been built in a form which provides very small displacements in response to modest currents. The transduction effect is shown to be linear and hysteresis- free which provides for accurate calibration of the transducer and highly repeatable performance. The HECTOR transducer can generate reliable and repeatable small displacements in the trans-nanometer region: that is the region characterized by dimensional sizes between about 100nm and smaller than an angstrom. HECTOR's displacements may be used as physical artifacts in the calibration of metrology instruments. This paper describes HECTOR's operating principles and calibration techniques and discuss the accuracy and stability of the artifacts that HECTOR can generate.

Paper Details

Date Published: 3 September 1998
PDF: 8 pages
Proc. SPIE 3507, Process, Equipment, and Materials Control in Integrated Circuit Manufacturing IV, (3 September 1998); doi: 10.1117/12.324354
Show Author Affiliations
Alson E. Hatheway, Alson E. Hatheway Inc. (United States)


Published in SPIE Proceedings Vol. 3507:
Process, Equipment, and Materials Control in Integrated Circuit Manufacturing IV
Anthony J. Toprac; Kim Dang, Editor(s)

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