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Proceedings Paper

Technological sensors on slow electromagnetic waves
Author(s): Yuri N. Pchelnikov; Andrey A. Yelizarov
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Paper Abstract

New methods for physical and technological parameters measurements are demonstrated. These methods are based on slow-wave structures application as sensitive elements and are using the dependence of phase velocity in slow-wave structure upon parameters of medium and the distance between slow-wave structure's conductors and between a slow-ave structure and other conductive surfaces. The phase velocity alteration leads to a sensitive element resonant frequency alteration which can be converted into a measuring generator frequency alteration. The peculiarities and advantages of slow-wave structure-based sensitive elements are considered. The possibility of the new method application in microelectronics and other brands of industry are shown. The practical realization of the mentioned above method have confirmed its sensitivity, accuracy and simplicity. It is shown that the use of sensitive elements based on the slow- wave structures is extremely promising in different technological processes and scientific research. Resistivity, permittivity, and permeability, thickness, continuity, linear and angular displacement, vibration, and many other physical and geometric parameters can be measured with high accuracy.

Paper Details

Date Published: 3 September 1998
PDF: 12 pages
Proc. SPIE 3507, Process, Equipment, and Materials Control in Integrated Circuit Manufacturing IV, (3 September 1998); doi: 10.1117/12.324350
Show Author Affiliations
Yuri N. Pchelnikov, MTS Systems Corp. (United States)
Andrey A. Yelizarov, Moscow State Institute of Electronics and Mathematics (Russia)

Published in SPIE Proceedings Vol. 3507:
Process, Equipment, and Materials Control in Integrated Circuit Manufacturing IV
Anthony J. Toprac; Kim Dang, Editor(s)

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