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Proceedings Paper

Fabrication of ordered nanostructure based on anodic porous alumina
Author(s): Hideki Masuda; Masashi Nakao; Toshiaki Tamamura; Hidetaka Asoh
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Paper Abstract

A highly ordered nanochannel array structure with high aspect ratios was fabricated based on the anodization of aluminum. A texturing treatment of the Al surface was carried out by nanoindentation process using the SiC mold initiated the development of an ideally-arranged-hole-array structure of anodic porous alumina. The hole-array has ideal hexagonal arrangement over millimeter dimensions, and the aspect ratio of the channel was over 150. In this report, the fabrication of the highly ordered nanochannel array and the application of the obtained structure to the preparation of nanostructures are described.

Paper Details

Date Published: 31 August 1998
PDF: 8 pages
Proc. SPIE 3511, Micromachining and Microfabrication Process Technology IV, (31 August 1998); doi: 10.1117/12.324328
Show Author Affiliations
Hideki Masuda, Tokyo Metropolitan Univ. (Japan)
Masashi Nakao, NTT Opto-Electronics Lab. (Japan)
Toshiaki Tamamura, NTT Opto-Electronics Lab. (Japan)
Hidetaka Asoh, Tokyo Metropolitan Univ. (Japan)

Published in SPIE Proceedings Vol. 3511:
Micromachining and Microfabrication Process Technology IV
James H. Smith, Editor(s)

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