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Proceedings Paper

Composite cantilever beam-mass structure gyroscope by a novel etching technology
Author(s): Xinxin Li; Minhang Bao; Heng Yang; Shaoqun Shen; Weiyuan Wang
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Paper Abstract

Described in this paper are a novel composite beam-mass structure and a micro gyroscope based on the structure. The composite beam consists of two sections: a section of vertical beam with a cross-section vertical to the wafer surface and a section of horizontal beam near the wafer surface. As the two sections have two orthogonal compliant directions, the structure has two orthogonal vibration modes: a vertical vibration mode decided by the horizontal beam and a lateral vibration mode decided by the vertical beam. Therefore, a vibratory gyroscope can be developed by this composite beam structure with a mass attached. As the composite beam is a multilevel structure that can hardly be fabricated by a conventional anisotropic etching technology, a novel 'maskless etching' technology for <100> vertical steps has been developed for the structure. Piezoresistive bridges on the surfaces of the horizontal and the vertical beams are used to monitor the driving vibration and to sense the output signal. Testing shows that the sensitivity from the piezoresistive bridge is 0.22 (mu) V/(degrees/sec) under a 6V AC driving with a DC bias. The special advantage of the sensor is the ability of working in an atmospheric environment.

Paper Details

Date Published: 31 August 1998
PDF: 8 pages
Proc. SPIE 3511, Micromachining and Microfabrication Process Technology IV, (31 August 1998); doi: 10.1117/12.324321
Show Author Affiliations
Xinxin Li, Fudan Univ. (China)
Minhang Bao, Fudan Univ. (China)
Heng Yang, Fudan Univ. (Netherlands)
Shaoqun Shen, Fudan Univ. (China)
Weiyuan Wang, Shanghai Institute of Metallurgy (China)

Published in SPIE Proceedings Vol. 3511:
Micromachining and Microfabrication Process Technology IV
James H. Smith, Editor(s)

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