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Proceedings Paper

MEMS assembly apparatus with a suction glass needle
Author(s): Dunwu Lu; Huijie Huang; Beijun Shen; Liangmin Yang; Zengshui Liu; Longlong Du
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Paper Abstract

To meet the MEMS assembly requirement, we have developed an assembly apparatus. This apparatus consists of a stereo microscope, a CCD camera incorporated with a video monitor, an X-Y translation precision stage, and a specifically fabricated suction glass needle. The suction glass needle is the core component in this apparatus, which is mounted on a micromanipulator, and used to suck up the microelements to be assembled. The assembly operation is carried out under the observation of a stereo microscope with a video camera. As a result, an electro-static micromotor with a 300 micrometer diameter rotor is accurately assembled by this assembly apparatus.

Paper Details

Date Published: 31 August 1998
PDF: 5 pages
Proc. SPIE 3511, Micromachining and Microfabrication Process Technology IV, (31 August 1998); doi: 10.1117/12.324317
Show Author Affiliations
Dunwu Lu, Shanghai Institute of Optics and Fine Mechanics (China)
Huijie Huang, Shanghai Institute of Optics and Fine Mechanics (China)
Beijun Shen, Shanghai Institute of Optics and Fine Mechanics (China)
Liangmin Yang, Shanghai Institute of Optics and Fine Mechanics (China)
Zengshui Liu, Shanghai Institute of Optics and Fine Mechanics (China)
Longlong Du, Shanghai Institute of Optics and Fine Mechanics (China)


Published in SPIE Proceedings Vol. 3511:
Micromachining and Microfabrication Process Technology IV
James H. Smith, Editor(s)

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