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Proceedings Paper

Optical properties of micromachined polysilicon reflective surfaces with etching holes
Author(s): Jun Zou; Colin Byrne; Chang Liu; David J. Brady
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Paper Abstract

MUMPS (Multi-User MEMS Process) is receiving increasingly wide use in micro optics. We have investigated the optical properties of the polysilicon reflective surface in a typical MUMPS chip within the visible light spectrum. The effect of etching holes on the reflected laser beam is studied. The reflectivity and diffraction patterns at five different wavelengths have been measured. The optical properties of the polysilicon reflective surface are greatly affected by the surface roughness, the etching holes, as well as the material. The etching holes contribute to diffraction and reduction of reflectivity. This study provides a basis for optimal design of micromachined free-space optical systems.

Paper Details

Date Published: 31 August 1998
PDF: 8 pages
Proc. SPIE 3511, Micromachining and Microfabrication Process Technology IV, (31 August 1998); doi: 10.1117/12.324315
Show Author Affiliations
Jun Zou, Univ. of Illinois/Urbana-Champaign (United States)
Colin Byrne, Univ. of Illinois/Urbana-Champaign (United States)
Chang Liu, Univ. of Illinois/Urbana-Champaign (United States)
David J. Brady, Univ. of Illinois/Urbana-Champaign (United States)


Published in SPIE Proceedings Vol. 3511:
Micromachining and Microfabrication Process Technology IV
James H. Smith, Editor(s)

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