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Proceedings Paper

Fabrication of polycrystalline diamond film resonators
Author(s): Xiaodong Wang; Yirong Yang; Jianfang Xie; Weiyuan Wang; Zongxin Ren
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Paper Abstract

In this paper, the fabrication process of polycrystalline diamond film micro-resonators was first reported. Silicon was used as substrate, LPCVD polysilicon films were used as diamond-growth-compatible sacrificial layer, and doped diamond films were grown and patterned by oxygen ion beam dry etching to be the resonators. The flexural beam resonator was vibrated in air under electrostatic excitation with AC voltage of 45 V.

Paper Details

Date Published: 31 August 1998
PDF: 5 pages
Proc. SPIE 3511, Micromachining and Microfabrication Process Technology IV, (31 August 1998); doi: 10.1117/12.324295
Show Author Affiliations
Xiaodong Wang, Shanghai Institute of Metallurgy (Singapore)
Yirong Yang, Shanghai Institute of Metallurgy (China)
Jianfang Xie, Shanghai Institute of Metallurgy (China)
Weiyuan Wang, Shanghai Institute of Metallurgy (China)
Zongxin Ren, Shanghai Institute of Metallurgy (China)


Published in SPIE Proceedings Vol. 3511:
Micromachining and Microfabrication Process Technology IV
James H. Smith, Editor(s)

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