Share Email Print
cover

Proceedings Paper

Automatic microassembly of radar sensors for automotive applications
Author(s): Matthias Nienhaus; Wolfgang Ehrfeld; Frank Michel; V. Graeff; Andrej Wolf
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Abstract

For the assembly of miniaturized radar distance sensors vacuum gripers for handling touch sensitive and very small millimeter wave monolithic integrated circuits (M3IC's) have been developed. The grippers are designed modularly to allow different combinations of gripper heads, chip-specific gripper plates and gripper exchange interfaces. The manufacture of the gripper components by (mu) -EDM and the batch processing of photoetchable glass is presented. In addition, a solution for the removal of M3IC's from adhesive carriers, such as VR Gel-Paks and bluetape with vacuum support has been developed which is suitable for automatic pick & place machine routines.

Paper Details

Date Published: 31 August 1998
PDF: 8 pages
Proc. SPIE 3511, Micromachining and Microfabrication Process Technology IV, (31 August 1998); doi: 10.1117/12.324291
Show Author Affiliations
Matthias Nienhaus, Institut fuer Mikrotechnik Mainz GmbH (Germany)
Wolfgang Ehrfeld, Institut fuer Mikrotechnik Mainz GmbH (Germany)
Frank Michel, Institut fuer Mikrotechnik Mainz GmbH (Germany)
V. Graeff, Institut fuer Mikrotechnik Mainz GmbH (Germany)
Andrej Wolf, Institut fuer Mikrotechnik Mainz GmbH (Germany)


Published in SPIE Proceedings Vol. 3511:
Micromachining and Microfabrication Process Technology IV
James H. Smith, Editor(s)

© SPIE. Terms of Use
Back to Top