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Proceedings Paper

Antistiction coatings for surface micromachines
Author(s): Roya Maboudian
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Paper Abstract

Adhesion, friction, and wear are prevalent problems in a majority of MEMS devices. Understanding of surface interactions in MEMS is of paramount importance for controlling stiction phenomena. This paper will discuss various surface treatments employed to reduce adhesion and friction in polysilicon-based MEMS, their successes and their limitations.

Paper Details

Date Published: 31 August 1998
PDF: 6 pages
Proc. SPIE 3511, Micromachining and Microfabrication Process Technology IV, (31 August 1998); doi: 10.1117/12.324288
Show Author Affiliations
Roya Maboudian, Univ. of California/Berkeley (United States)

Published in SPIE Proceedings Vol. 3511:
Micromachining and Microfabrication Process Technology IV
James H. Smith, Editor(s)

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