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Proceedings Paper

MOEM pressure and other physical sensors using photon tunneling and optical evanescent fields with exponential sensitivities and excellent stabilities
Author(s): Massood Tabib-Azar; Boonsong Sutapun
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Paper Abstract

Evanescent optical fields and photon tunneling junctions can be used to monitor position of an object with an exponential sensitivity given by exp(-x/x0) where x0 is the fraction of the photon wavelength. Compared with electron tunneling methods, photon based physical sensors do not suffer from coulombic attractive forces (and backlashes) and tunneling junction deterioration that result in modification of the sensor sensitivity and excess noise, respectively. Experimental results obtained using fiber optic photon tunneling junctions and micromachined Si diaphragms clearly indicate the exponential sensitivity of these sensors. We will present these experimental data and discuss design rules and methodologies for photon tunneling physical sensors and accelerometers.

Paper Details

Date Published: 2 September 1998
PDF: 13 pages
Proc. SPIE 3513, Microelectronic Structures and MEMS for Optical Processing IV, (2 September 1998); doi: 10.1117/12.324280
Show Author Affiliations
Massood Tabib-Azar, Case Western Reserve Univ. (United States)
Boonsong Sutapun, Case Western Reserve Univ. (United States)


Published in SPIE Proceedings Vol. 3513:
Microelectronic Structures and MEMS for Optical Processing IV
M. Edward Motamedi; Hans Peter Herzig, Editor(s)

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