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Proceedings Paper

High-brightness projection display systems based on the thin-film actuated mirror array (TFAMA)
Author(s): Kyu-Ho Hwang; Myung-Kwon Koo; Sang-Gook Kim
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Paper Abstract

The Thin-Film Actuated Mirror Array (TFAMA) is a new reflective type spatial light modulator developed by using the microelectromechanical system technology. The micromachined thin-film piezoelectric actuators are used to control the tilting angle of micromirrors. This paper describes the principle, design, fabrication and the performance of the TFAMA module for high-brightness projection displays. Maximizing the optical performance in terms of the fill factor and the mirror flatness is the main issue of this paper. A hidden actuator design with the two- spacer process provides the highest optical efficiency among the reflection light modulators at the present time. A working projector prototype of 5,000 ANSI lumen is realized with three TFAMA modules with a 1 kW Xenon lamp.

Paper Details

Date Published: 2 September 1998
PDF: 10 pages
Proc. SPIE 3513, Microelectronic Structures and MEMS for Optical Processing IV, (2 September 1998); doi: 10.1117/12.324276
Show Author Affiliations
Kyu-Ho Hwang, Daewoo Electronics Co., Ltd. (South Korea)
Myung-Kwon Koo, Daewoo Electronics Co., Ltd. (South Korea)
Sang-Gook Kim, Daewoo Electronics Co., Ltd. (United States)

Published in SPIE Proceedings Vol. 3513:
Microelectronic Structures and MEMS for Optical Processing IV
M. Edward Motamedi; Hans Peter Herzig, Editor(s)

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