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Proceedings Paper

Novel beam-steering micromirror device
Author(s): R. Wayne Fuchs; Hubert Jerominek; Nicholas R. Swart; Yacouba Diawara; Mario Lehoux; Ghislain Bilodeau; Simon Savard; Felix Cayer; Yves Rouleau; Patrick Lemire
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Paper Abstract

A novel type of light modulating micromirror device has been designed and fabricated. A unique hinge structure provides the device with the potential for modulating both the phase and amplitude of light signals, while its high thermal conductivity makes the device amenable to high power laser applications. An extremely high fill factor can be attained since the hinges lie entirely beneath the mirror surface. This hidden hinge structure is comprised of a single level and therefore involves a simple fabrication process. Micromirrors with dimensions ranging from 100 micrometers X 100 micrometers to 300 micrometers X 300 micrometers with maximum deflection angles from 2 degree(s) to 4 degree(s) were fabricated. The devices were characterized in terms of the reflecting surface optical quality, the operational modes attainable, the critical voltages (as low as 15 volts), and the response time (as short as 125 microsecond(s) ).

Paper Details

Date Published: 2 September 1998
PDF: 10 pages
Proc. SPIE 3513, Microelectronic Structures and MEMS for Optical Processing IV, (2 September 1998); doi: 10.1117/12.324270
Show Author Affiliations
R. Wayne Fuchs, INO (Canada)
Hubert Jerominek, INO (Canada)
Nicholas R. Swart, INO (Canada)
Yacouba Diawara, INO (Canada)
Mario Lehoux, INO (Canada)
Ghislain Bilodeau, INO (Canada)
Simon Savard, INO (Canada)
Felix Cayer, INO (Canada)
Yves Rouleau, INO (Canada)
Patrick Lemire, INO (Canada)

Published in SPIE Proceedings Vol. 3513:
Microelectronic Structures and MEMS for Optical Processing IV
M. Edward Motamedi; Hans Peter Herzig, Editor(s)

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