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Proceedings Paper

Extremely high aspect ratio metal structures for suspension of a micro-optical shutter
Author(s): Allan P. Hui; Risaku Toda; Masayoshi Esashi
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Paper Abstract

A bulk micromachining process for fabricating extremely high aspect ratio metal structures is developed. The structures are thin films perpendicular to the plane of the substrate. The metal structures offer various physical and chemical properties depending on the choice of the metal used. Internal stress considerations for the choice of metal are also discussed.

Paper Details

Date Published: 2 September 1998
PDF: 6 pages
Proc. SPIE 3513, Microelectronic Structures and MEMS for Optical Processing IV, (2 September 1998); doi: 10.1117/12.324269
Show Author Affiliations
Allan P. Hui, Univ. of Washington (United States)
Risaku Toda, Tohoku Univ. (Japan)
Masayoshi Esashi, Tohoku Univ. (Japan)


Published in SPIE Proceedings Vol. 3513:
Microelectronic Structures and MEMS for Optical Processing IV
M. Edward Motamedi; Hans Peter Herzig, Editor(s)

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