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Proceedings Paper

Optical coupling analysis and vibration characterization for packaging of 2X2 MEMS vertical torsion mirror switches
Author(s): Long-Sun Huang; Shi-sheng Lee; M. Edward Motamedi; Ming C. Wu; Chang-Jin Kim
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Paper Abstract

We report optical coupling loss and vibration characterization for packaging of 2 X 2 vertical torsion mirror switches. The coupling losses of fiber-to-fiber and fiber-lens-lens-fiber are examined in order to design 2 X 2 MEMS optical switches required for the performance specification. The results indicate that the fiber-lens- lens-fiber configuration provides a over 1 mm working distance of 2.5 dB loss between the lens centers. The fiber- to-fiber only allows 175 micrometers for the same loss. In addition, the mechanical frequency response of the vertical torsion mirror is experimentally examined by electrostatic excitation. The discrepancy between the calculated and the measured nature frequencies is investigated by the study of the effect of the in-house post processes.

Paper Details

Date Published: 2 September 1998
PDF: 9 pages
Proc. SPIE 3513, Microelectronic Structures and MEMS for Optical Processing IV, (2 September 1998); doi: 10.1117/12.324267
Show Author Affiliations
Long-Sun Huang, Univ. of California/Los Angeles (United States)
Shi-sheng Lee, Univ. of California/Los Angeles (United States)
M. Edward Motamedi, Rockwell Science Ctr. (United States)
Ming C. Wu, Univ. of California/Los Angeles (United States)
Chang-Jin Kim, Univ. of California/Los Angeles (United States)


Published in SPIE Proceedings Vol. 3513:
Microelectronic Structures and MEMS for Optical Processing IV
M. Edward Motamedi; Hans Peter Herzig, Editor(s)

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