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Proceedings Paper

Thin film resonators for TNT vapor detection
Author(s): Paul H. Kobrin; Charles Seabury; Christopher Linnen; Alan B. Harker; Russell Chung; Robert Andrew McGill; Paul J. Matthews
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Paper Abstract

Progress on the development of a miniature mass transducer for low level vapor detection is described. Thin-film bulk acoustic wave resonators (TFRs) are fabricated with AlN as the piezoelectric layer onto an acoustically reflecting solid substrate. Q's of 200 at 2 GHz have been measured. Comparison of the sensitivity of these 2 GHz TFRs with 250 MHz surface acoustic wave resonators is made. A set of TFRs with species selective coatings has the potential of detecting TNT vapor at the sub PPT level. Detection of 5 ppb TNT with a signal to noise of 200:1 is demonstrated.

Paper Details

Date Published: 4 September 1998
PDF: 6 pages
Proc. SPIE 3392, Detection and Remediation Technologies for Mines and Minelike Targets III, (4 September 1998); doi: 10.1117/12.324215
Show Author Affiliations
Paul H. Kobrin, Rockwell Science Ctr. (United States)
Charles Seabury, Rockwell Science Ctr. (United States)
Christopher Linnen, Rockwell Science Ctr. (United States)
Alan B. Harker, Rockwell Science Ctr. (United States)
Russell Chung, Geo-Centers, Inc. (United States)
Robert Andrew McGill, Naval Research Lab. (United States)
Paul J. Matthews, Naval Research Lab. (United States)

Published in SPIE Proceedings Vol. 3392:
Detection and Remediation Technologies for Mines and Minelike Targets III
Abinash C. Dubey; James F. Harvey; J. Thomas Broach, Editor(s)

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