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Proceedings Paper

Strategy to determine the constant of elasticity for static micromechanical structures with given shape
Author(s): Mihaela Ilie; Hans-Dieter Liess; Nicolae Moldovan; Veit Meister; Sorin Nedelcu; Eugen Vasile; Aurel Vitriuc
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Paper Abstract

The aim of this work was to determine the constant of elasticity for a static silicon micromechanical structure with a given shape, having its width and length in the hundredths of micrometers range and its thickness in the micrometer domain, subject to torsion. This is done by experimentally studying the torsion vibration of the structure. On this purpose, test structures have been manufactured, with thickness varying in a certain domain. Special alignment marks have been used in order to align the structures with respect to the crystallographic directions of the silicon. The structures have been activated with acoustic waves. The resonance frequency in the torsion mode has been measured by means of an optical set-up. Successive measurements and etch-thinnings of the structures provided the dependency of the resonant frequency on the structure thickness. A theoretical formula expressing the resonance frequency fr in terms of the shear modulus G, thickness e, and damping coefficient γ has been fitted with the experimental points in order to obtain the values of G and g. The proportionality factor k between the activation force and the angular or linear displacement has been caluclated in terms of mechanical engineering. Considerations regarding the bending phenomenon complete the strategy to determine the constant of elasticity for arbitrary structures.

Paper Details

Date Published: 1 September 1998
PDF: 10 pages
Proc. SPIE 3512, Materials and Device Characterization in Micromachining, (1 September 1998); doi: 10.1117/12.324087
Show Author Affiliations
Mihaela Ilie, National Institute for Research and Development in Microtechnology (Romania)
Hans-Dieter Liess, Univ. der Bundeswehr Muenchen (Germany)
Nicolae Moldovan, National Institute for Research and Development in Microtechnology (Romania)
Veit Meister, Univ. der Bundeswehr Muenchen (Germany)
Sorin Nedelcu, National Institute for Research and Development in Microtechnology (Romania)
Eugen Vasile, National Institute for Research and Development in Microtechnology (Romania)
Aurel Vitriuc, National Institute for Research and Development in Microtechnology (Romania)


Published in SPIE Proceedings Vol. 3512:
Materials and Device Characterization in Micromachining
Craig R. Friedrich; Yuli Vladimirsky, Editor(s)

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